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Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters
Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters
Molecular Dynamics Analysis of Structure and Intrinsic Stress in Amorphous Silicon Carbide Film with Deposition Process Parameters
Kim, J. Y. (Autor:in) / Lee, B. W. (Autor:in) / Nam, H. S. (Autor:in) / Kwon, D. (Autor:in) / Kang, S.-G. / Kobayashi, T.
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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