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Growth of Ga2O3 thin films on Si(100) substrates using a trimethylgallium and oxygen mixture
Growth of Ga2O3 thin films on Si(100) substrates using a trimethylgallium and oxygen mixture
Growth of Ga2O3 thin films on Si(100) substrates using a trimethylgallium and oxygen mixture
Kim, H. W. (Autor:in) / Kim, N. H. (Autor:in) / Lee, C. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 39 ; 3461-3463
01.01.2004
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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