Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII-D): Fid-Bau Portal

Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII-D)

Yao, Z. Q. / Yang, P. / Huang, N. / Sun, H. / Wang, J.

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Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII-D)

Yao, Z. Q. / Yang, P. / Huang, N. / Sun, H. / Wang, J.

Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII-D)

Yao, Z. Q. / Yang, P. / Huang, N. / Sun, H. / Wang, J.

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Titel:

Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII-D)

Beteiligte:

Yao, Z. Q. (Autor:in) / Yang, P. (Autor:in) / Huang, N. (Autor:in) / Sun, H. (Autor:in) / Wang, J. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 230 ; 172-178

Erscheinungsdatum:

01.01.2004

Format / Umfang:

7 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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Electrical Properties of Fluorine Doped Diamond Like Carbon

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