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Initial Stages of Thermal Oxidation of 4H-SiC (1120) Studied by Photoelectron Spectroscopy
Initial Stages of Thermal Oxidation of 4H-SiC (1120) Studied by Photoelectron Spectroscopy
Initial Stages of Thermal Oxidation of 4H-SiC (1120) Studied by Photoelectron Spectroscopy
Seyller, T. (Autor:in) / Emtsev, K. V. (Autor:in) / Graupner, R. (Autor:in) / Ley, L. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 1317-1320
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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