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Initial Stages of Thermal Oxidation of 4H-SiC (1120) Studied by Photoelectron Spectroscopy
Initial Stages of Thermal Oxidation of 4H-SiC (1120) Studied by Photoelectron Spectroscopy
Initial Stages of Thermal Oxidation of 4H-SiC (1120) Studied by Photoelectron Spectroscopy
Seyller, T. (author) / Emtsev, K. V. (author) / Graupner, R. (author) / Ley, L. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 1317-1320
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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