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Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation
Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation
Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation
Panknin, D. (Autor:in) / Godignon, P. (Autor:in) / Mestres, N. (Autor:in) / Polychroniadis, E. (Autor:in) / Stoemenos, J. (Autor:in) / Ferro, G. (Autor:in) / Pezoldt, J. (Autor:in) / Skorupa, W. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 1515-1518
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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