Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation: Fid-Bau Portal

Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation

Panknin, D. / Godignon, P. / Mestres, N. / Polychroniadis, E. / Stoemenos, J. / Ferro, G. / Pezoldt, J. / Skorupa, W.

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Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation

Panknin, D. / Godignon, P. / Mestres, N. / Polychroniadis, E. / Stoemenos, J. / Ferro, G. / Pezoldt, J. / Skorupa, W.

Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation

Panknin, D. / Godignon, P. / Mestres, N. / Polychroniadis, E. / Stoemenos, J. / Ferro, G. / Pezoldt, J. / Skorupa, W.

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Title:

Formation of 3C-SiC Films Embedded in SiO~2 by Sacrificial Oxidation

Contributors:

Panknin, D. (author) / Godignon, P. (author) / Mestres, N. (author) / Polychroniadis, E. (author) / Stoemenos, J. (author) / Ferro, G. (author) / Pezoldt, J. (author) / Skorupa, W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 1515-1518

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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