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Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching
Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching
Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching
Bondokov, R. T. (Autor:in) / Tipirneni, N. (Autor:in) / Cherednichenko, D. I. (Autor:in) / Sudarshan, T. S. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 431-436
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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