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    Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching

    New search for: Bondokov, R. T.
    New search for: Tipirneni, N.
    New search for: Cherednichenko, D. I.
    New search for: Sudarshan, T. S.

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    Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching

    New search for: Bondokov, R. T.
    New search for: Tipirneni, N.
    New search for: Cherednichenko, D. I.
    New search for: Sudarshan, T. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching

    New search for: Bondokov, R. T.
    New search for: Tipirneni, N.
    New search for: Cherednichenko, D. I.
    New search for: Sudarshan, T. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching

    Contributors:

    Bondokov, R. T. (author) / Tipirneni, N. (author) / Cherednichenko, D. I. (author) / Sudarshan, T. S. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 457/460 ; 431-436

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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