Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Influence of surface additives iodine and indium on the initial growth in copper chemical vapor deposition
Influence of surface additives iodine and indium on the initial growth in copper chemical vapor deposition
Influence of surface additives iodine and indium on the initial growth in copper chemical vapor deposition
Chang, T. Y. ( Autor:in ) / Tze, J. J. ( Autor:in ) / Tsai, D. S. ( Autor:in )
APPLIED SURFACE SCIENCE ; 236 ; 165-174
01.01.2004
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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