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Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature
Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature
Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature
Tsuji, H. (Autor:in) / Arai, N. (Autor:in) / Matsumoto, T. (Autor:in) / Ueno, K. (Autor:in) / Gotoh, Y. (Autor:in) / Adachi, K. (Autor:in) / Kotaki, H. (Autor:in) / Ishikawa, J. (Autor:in)
APPLIED SURFACE SCIENCE ; 238 ; 132-137
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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