Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature: Fid-Bau Portal

Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature

Tsuji, H. / Arai, N. / Matsumoto, T. / Ueno, K. / Gotoh, Y. / Adachi, K. / Kotaki, H. / Ishikawa, J.

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Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature

Tsuji, H. / Arai, N. / Matsumoto, T. / Ueno, K. / Gotoh, Y. / Adachi, K. / Kotaki, H. / Ishikawa, J.

Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature

Tsuji, H. / Arai, N. / Matsumoto, T. / Ueno, K. / Gotoh, Y. / Adachi, K. / Kotaki, H. / Ishikawa, J.

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Title:

Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature

Contributors:

Tsuji, H. (author) / Arai, N. (author) / Matsumoto, T. (author) / Ueno, K. (author) / Gotoh, Y. (author) / Adachi, K. (author) / Kotaki, H. (author) / Ishikawa, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 238 ; 132-137

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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