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Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving
Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving
Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving
Jaballah, A. B. (Autor:in) / Saadoun, M. (Autor:in) / Hajji, M. (Autor:in) / Ezzaouia, H. (Autor:in) / Bessais, B. (Autor:in)
APPLIED SURFACE SCIENCE ; 238 ; 199-203
01.01.2004
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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