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Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving

Jaballah, A. B. / Saadoun, M. / Hajji, M. / Ezzaouia, H. / Bessais, B.

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Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving

Jaballah, A. B. / Saadoun, M. / Hajji, M. / Ezzaouia, H. / Bessais, B.

Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving

Jaballah, A. B. / Saadoun, M. / Hajji, M. / Ezzaouia, H. / Bessais, B.

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Document information

Title:

Silicon dissolution regimes from chemical vapour etching: from porous structures to silicon grooving

Contributors:

Jaballah, A. B. (author) / Saadoun, M. (author) / Hajji, M. (author) / Ezzaouia, H. (author) / Bessais, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 238 ; 199-203

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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