Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Anticipation of nitrided oxides electrical thickness based on XPS measurement
Anticipation of nitrided oxides electrical thickness based on XPS measurement
Anticipation of nitrided oxides electrical thickness based on XPS measurement
Bienacel, J. (Autor:in) / Barge, D. (Autor:in) / Bidaud, M. (Autor:in) / Emonet, N. (Autor:in) / Roy, D. (Autor:in) / Vishnubhotla, L. (Autor:in) / Pouilloux, I. (Autor:in) / Barla, K. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 181-183
01.01.2004
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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