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A platform for research: civil engineering, architecture and urbanism
Anticipation of nitrided oxides electrical thickness based on XPS measurement
Anticipation of nitrided oxides electrical thickness based on XPS measurement
Anticipation of nitrided oxides electrical thickness based on XPS measurement
Bienacel, J. (author) / Barge, D. (author) / Bidaud, M. (author) / Emonet, N. (author) / Roy, D. (author) / Vishnubhotla, L. (author) / Pouilloux, I. (author) / Barla, K. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 181-183
2004-01-01
3 pages
Article (Journal)
English
DDC:
621.38152
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