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Experimental evidence of Si nanocluster d-layer formation in buried and thin SiO2 films induced by ion irradiation
Experimental evidence of Si nanocluster d-layer formation in buried and thin SiO2 films induced by ion irradiation
Experimental evidence of Si nanocluster d-layer formation in buried and thin SiO2 films induced by ion irradiation
Rontzsch, L. (Autor:in) / Heinig, K. H. (Autor:in) / Schmidt, B. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 357-362
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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