Analysis and Optical Design of 1:1 Projection Lithography System

Lin, Q.H. / Zhou, J.Y. / Li, W.J. | British Library Online Contents | 2008

Fabrication of Diffractive and Micro-optical Elements Using Microlens Projection Lithography

Wu, M.-H. / Whitesides, G. M. | British Library Online Contents | 2002

Study on contamination of projection optics surface for extreme ultraviolet lithography

Koida, K. / Niibe, M. | British Library Online Contents | 2009

Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography

Burckel, D. B. / Wendt, J. R. / Ten Eyck, G. A. et al. | British Library Online Contents | 2010

On the similarities between micro/nano lithography and topology optimization projection methods

Jansen, M. / Lazarov, B. S. / Schevenels, M. et al. | British Library Online Contents | 2013