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Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Burckel, D. B. (Autor:in) / Wendt, J. R. (Autor:in) / Ten Eyck, G. A. (Autor:in) / Ellis, A. R. (Autor:in) / Brener, I. (Autor:in) / Sinclair, M. B. (Autor:in)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 22 ; 3171-3175
01.01.2010
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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