Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition

Zhang, X. / Wu, X. / Zhang, H. et al. | British Library Online Contents | 2003

Properties of boron and phosphorous incorporated tetrahedral amorphous carbon films grown using filtered cathodic vacuum arc process

Panwar, O. S. / Khan, M. A. / Satyanarayana, B. S. et al. | British Library Online Contents | 2010

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, L. J. / Sheeja, D. / Tay, B. K. et al. | British Library Online Contents | 2002

Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

Liujiang, Y. / Tay, B. K. / Sheeja, D. et al. | British Library Online Contents | 2004

Stress, mechanical and adhesion properties of multilayer tetrahedral amorphous carbon films

Han, X. / Zhu, J. / Han, J. et al. | British Library Online Contents | 2008