Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

Yu, L. J. / Sheeja, D. / Tay, B. K. et al. | British Library Online Contents | 2002

Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition

Zhang, X. / Wu, X. / Zhang, H. et al. | British Library Online Contents | 2003

Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition

Zhang, X. / Zhang, H. / Wu, X. et al. | British Library Online Contents | 2005

Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Tay, B. K. / Zhao, Z. W. / Chua, D. H. | British Library Online Contents | 2006

Properties of boron and phosphorous incorporated tetrahedral amorphous carbon films grown using filtered cathodic vacuum arc process

Panwar, O. S. / Khan, M. A. / Satyanarayana, B. S. et al. | British Library Online Contents | 2010