Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Fabrication of Si~3N~4 Micro-Components by a Combined Microfabrication Process
Fabrication of Si~3N~4 Micro-Components by a Combined Microfabrication Process
Fabrication of Si~3N~4 Micro-Components by a Combined Microfabrication Process
Li, J. F. (Autor:in) / Jin, S. (Autor:in) / Li, Y. (Autor:in) / Kim, H.-D. / Lin, H.-T. / Hoffmann, M. J.
01.01.2005
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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