A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Fabrication of Si~3N~4 Micro-Components by a Combined Microfabrication Process
Fabrication of Si~3N~4 Micro-Components by a Combined Microfabrication Process
Fabrication of Si~3N~4 Micro-Components by a Combined Microfabrication Process
Li, J. F. (author) / Jin, S. (author) / Li, Y. (author) / Kim, H.-D. / Lin, H.-T. / Hoffmann, M. J.
2005-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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