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Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR
Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR
Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR
Lee, J. J. (Autor:in) / Kim, Y. B. (Autor:in) / Yoon, Y. S. (Autor:in)
APPLIED SURFACE SCIENCE ; 244 ; 365-368
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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