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Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR
Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR
Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (100) substrate for FBAR
Lee, J. J. (author) / Kim, Y. B. (author) / Yoon, Y. S. (author)
APPLIED SURFACE SCIENCE ; 244 ; 365-368
2005-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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