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HBV deep mesa etching in InGaAs/InAlAs/AlAs heterostructures on InP substrate
HBV deep mesa etching in InGaAs/InAlAs/AlAs heterostructures on InP substrate
HBV deep mesa etching in InGaAs/InAlAs/AlAs heterostructures on InP substrate
Gorska, M. (Autor:in) / Wrzesinska, H. (Autor:in) / Szerling, A. (Autor:in) / Hejduk, K. (Autor:in) / Lysko, J. M. (Autor:in)
MATERIALS SCIENCE -WROCLAW- ; 23 ; 221-226
01.01.2005
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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