Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation

Smausz, T. / Csizmadia, T. / Kresz, N. et al. | British Library Online Contents | 2007

Laser induced backside dry etching of transparent materials

Hopp, B. / Vass, C. / Smausz, T. | British Library Online Contents | 2007

Laser-induced backside wet etching of glasses and crystals

Böhme, Rico | BASE | 2007

The influence of laser-induced surface modifications on the backside etching process

Zimmer, K. / Bohme, R. / Ruthe, D. et al. | British Library Online Contents | 2007

Etching of fused silica fiber by metallic laser-induced backside wet etching technique

Vass, C. / Kiss, B. / Kopniczky, J. et al. | British Library Online Contents | 2013