Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The influence of laser-induced surface modifications on the backside etching process
The influence of laser-induced surface modifications on the backside etching process
The influence of laser-induced surface modifications on the backside etching process
Zimmer, K. (Autor:in) / Bohme, R. (Autor:in) / Ruthe, D. (Autor:in) / Rauschenbach, B. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 6588-6594
01.01.2007
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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