Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering: Fid-Bau Portal

Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Anufriev, L. P. / Turtsevich, A. S. / Glukhmanchuk, V. V. / Solov ev, Y. A. / Baranov, V. V.

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Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Anufriev, L. P. / Turtsevich, A. S. / Glukhmanchuk, V. V. / Solov ev, Y. A. / Baranov, V. V.

Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Anufriev, L. P. / Turtsevich, A. S. / Glukhmanchuk, V. V. / Solov ev, Y. A. / Baranov, V. V.

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Titel:

Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Beteiligte:

Anufriev, L. P. (Autor:in) / Turtsevich, A. S. (Autor:in) / Glukhmanchuk, V. V. (Autor:in) / Solov ev, Y. A. (Autor:in) / Baranov, V. V. (Autor:in)

Erschienen in:

SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY C/C OF ELEKTRONNAIA OBRABOTKA MATERIALOV ; 76-80

Erscheinungsdatum:

01.01.2005

Format / Umfang:

5 pages

ISSN:

1068-3755

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.44 / 660.297

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