Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering: Fid-Bau Portal

Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Anufriev, L. P. / Turtsevich, A. S. / Glukhmanchuk, V. V. / Solov ev, Y. A. / Baranov, V. V.

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Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Anufriev, L. P. / Turtsevich, A. S. / Glukhmanchuk, V. V. / Solov ev, Y. A. / Baranov, V. V.

Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Anufriev, L. P. / Turtsevich, A. S. / Glukhmanchuk, V. V. / Solov ev, Y. A. / Baranov, V. V.

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Title:

Investigation of influence of forming conditions on properties of thin films of molybdenum, deposited by magnetron sputtering

Contributors:

Anufriev, L. P. (author) / Turtsevich, A. S. (author) / Glukhmanchuk, V. V. (author) / Solov ev, Y. A. (author) / Baranov, V. V. (author)

Published in:

SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY C/C OF ELEKTRONNAIA OBRABOTKA MATERIALOV ; 76-80

Publication date:

2005-01-01

Size:

5 pages

ISSN:

1068-3755

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44 / 660.297

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