Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
Noh, K. C. (Autor:in) / Oh, M. D. (Autor:in) / Lee, S. C. (Autor:in)
BUILDING AND ENVIRONMENT ; 40 ; 1431-1440
01.01.2005
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
690
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