A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
Noh, K. C. (author) / Oh, M. D. (author) / Lee, S. C. (author)
BUILDING AND ENVIRONMENT ; 40 ; 1431-1440
2005-01-01
10 pages
Article (Journal)
English
DDC:
690
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