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Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
Isono, Y. (Autor:in) / Kikuchi, T. (Autor:in) / Kitoh, H. (Autor:in) / Kim, Y.-J. / Bae, D.-H.
01.01.2005
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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