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Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
Isono, Y. (author) / Kikuchi, T. (author) / Kitoh, H. (author) / Kim, Y.-J. / Bae, D.-H.
2005-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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