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RF-power-controlled young's modulus of plasma-polymerized organosilicon films
RF-power-controlled young's modulus of plasma-polymerized organosilicon films
RF-power-controlled young's modulus of plasma-polymerized organosilicon films
Cech, V. (Autor:in) / Vanek, J. (Autor:in) / Goruppa, A. A. (Autor:in) / Jones, F. R. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 40 ; 5099-5102
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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