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RF-power-controlled young's modulus of plasma-polymerized organosilicon films
RF-power-controlled young's modulus of plasma-polymerized organosilicon films
RF-power-controlled young's modulus of plasma-polymerized organosilicon films
Cech, V. (author) / Vanek, J. (author) / Goruppa, A. A. (author) / Jones, F. R. (author)
JOURNAL OF MATERIALS SCIENCE ; 40 ; 5099-5102
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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