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Investigation of hydrogen implantation-induced blistering in SiGe
Investigation of hydrogen implantation-induced blistering in SiGe
Investigation of hydrogen implantation-induced blistering in SiGe
Singh, R. (Autor:in) / Radu, I. (Autor:in) / Reiche, M. (Autor:in) / Scholz, R. (Autor:in) / Webb, D. (Autor:in) / Gosele, U. (Autor:in) / Christiansen, S. H. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 162-165
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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