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Investigation of hydrogen implantation-induced blistering in SiGe
Investigation of hydrogen implantation-induced blistering in SiGe
Investigation of hydrogen implantation-induced blistering in SiGe
Singh, R. (author) / Radu, I. (author) / Reiche, M. (author) / Scholz, R. (author) / Webb, D. (author) / Gosele, U. (author) / Christiansen, S. H. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 162-165
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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