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Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
Katayama, M. (Autor:in) / Itaka, K. (Autor:in) / Matsumoto, Y. (Autor:in) / Koinuma, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 252 ; 2461-2465
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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