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Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
Katayama, M. (author) / Itaka, K. (author) / Matsumoto, Y. (author) / Koinuma, H. (author)
APPLIED SURFACE SCIENCE ; 252 ; 2461-2465
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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