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Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD
Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD
Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD
Zhan, B.-h. (Autor:in) / Song, C.-l. (Autor:in) / Liu, Y. (Autor:in) / Zhu, J.-q. (Autor:in) / Han, G.-r. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 23 ; 843-845
01.01.2005
3 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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