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Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD

Zhan, B.-h. / Song, C.-l. / Liu, Y. / Zhu, J.-q. / Han, G.-r.

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Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD

Zhan, B.-h. / Song, C.-l. / Liu, Y. / Zhu, J.-q. / Han, G.-r.

Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD

Zhan, B.-h. / Song, C.-l. / Liu, Y. / Zhu, J.-q. / Han, G.-r.

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Check availability in my library

Order at Subito €

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Document information

Title:

Optical Properties of Ethylene-doped Amorphous Si Film Prepared by APCVD

Contributors:

Zhan, B.-h. (author) / Song, C.-l. (author) / Liu, Y. (author) / Zhu, J.-q. (author) / Han, G.-r. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 23 ; 843-845

Publication date:

2005-01-01

Size:

3 pages

ISSN:

1004-793X

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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