Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
Chen, R. (Autor:in) / Bent, S. F. (Autor:in)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 18 ; 1086-1090
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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