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A platform for research: civil engineering, architecture and urbanism
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
Chemistry for Positive Pattern Transfer Using Area-Selective Atomic Layer Deposition
Chen, R. (author) / Bent, S. F. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 18 ; 1086-1090
2006-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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