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In situ reflectivity investigations of solid/liquid interface during laser backside etching
In situ reflectivity investigations of solid/liquid interface during laser backside etching
In situ reflectivity investigations of solid/liquid interface during laser backside etching
Bohme, R. (Autor:in) / Otto, T. (Autor:in) / Zimmer, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 252 ; 4392-4396
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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