Time-resolved measurements during backside dry etching of fused silica

Zimmer, K. / Bohme, R. / Vass, C. et al. | British Library Online Contents | 2009

Backside etching of fused silica with Nd:YAG laser

Zimmer, K. / Bohme, R. / Pissadakis, S. et al. | British Library Online Contents | 2006

Etching of fused silica fiber by metallic laser-induced backside wet etching technique

Vass, C. / Kiss, B. / Kopniczky, J. et al. | British Library Online Contents | 2013

Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses

Ehrhardt, M. / Raciukaitis, G. / Gecys, P. et al. | British Library Online Contents | 2010

Fabrication of 550nm gratings in fused silica by laser induced backside wet etching technique

Vass, C. / Osvay, K. / Csete, M. et al. | British Library Online Contents | 2007