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Effect of annealing atmospheres on the void defects in large-diameter CZSi single crystals
Effect of annealing atmospheres on the void defects in large-diameter CZSi single crystals
Effect of annealing atmospheres on the void defects in large-diameter CZSi single crystals
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 117-120
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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