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Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB2 nanocomposite films on Si(100)
Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB2 nanocomposite films on Si(100)
Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB2 nanocomposite films on Si(100)
Chu, K. (Autor:in) / Liu, Z. J. (Autor:in) / Lu, Y. H. (Autor:in) / Shen, Y. G. (Autor:in)
APPLIED SURFACE SCIENCE ; 252 ; 8091-8095
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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