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Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB2 nanocomposite films on Si(100)
Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB2 nanocomposite films on Si(100)
Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB2 nanocomposite films on Si(100)
Chu, K. (author) / Liu, Z. J. (author) / Lu, Y. H. (author) / Shen, Y. G. (author)
APPLIED SURFACE SCIENCE ; 252 ; 8091-8095
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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