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Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon
Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon
Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon
Tanaka, M. (Autor:in) / Higashida, K. (Autor:in) / Nakashima, H. (Autor:in) / Takagi, H. (Autor:in) / Fujiwara, M. (Autor:in)
INTERNATIONAL JOURNAL OF FRACTURE ; 139 ; 383-394
01.01.2006
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.1126
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